The performance of organic(opto)-electronic devices depends largely on the morphology and molecular orientation of the orgnic semiconductor films.It is of great necessity for us to gain insight into the growth stage of the deposition process.In this work,we performed molecular dynamic simulations of the deposition of copper phthalocyanine(CuPc)molecules on a completely hydrated SiO 2(100)surface,with different initial configurations(i.e.,standing upright or lying down).The results show that CuPc molecules tend to rapidly draw near to the substrate surface with the molecule distortion in a butterfly-shaped conformation no matter starting from which initial configurations.It is worth noting that the aggregation of CuPc molecules into parallel clusters could be observed when additional molecules are added every 1000 ps.