1.Nano-Structured Materials have been in the focus of semiconductor technology roadmaps and world-wide development efforts.Nano-structured materials have been known for special properties and behaviors that are related to the rule of quantum physics in the nano domain.In semiconducting matcrials some of these properties and aspects are suitable to improve the absorption of sun light and the subsequent generation of charge carriers.In conducting materials some of these properties are suitable to reduce the sheet resistance and to improve the extraction of charge carriers.2.Laser-Induced Nano-Structuring of Thin Films has achieved significant advantages compared to traditional heat treatment like, e.g., furnaces.However, there has been no industrial implementation of laser nano-structuring of thins films yet, because the business case for this technology has so far been unattractive.This has now changed with the arrival of a breakthrough technology called "L3-LIMO Line Lasers(R)() that allows for cost effective, high speed, large area thin film transformation and activation on the nano scale.3.First Laser-Induced Nano-Structured Thin Film Silicon Solar Cells have been demonstrated by laboratory production and testing.We show first results of the improvements that we achieved in nano-structured Silicon absorber and TCO conductor materials.We present nano scale materials changes induced by laser treatment using a time modulated transient regime called "very rapid thermal processing" (vRTP).We also give an outline of further improvements and changes that we consider achievable.We show a path to cost effective industrial mass production of thin film Silicon solar cells based on laser-induced nano-structures.