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A new type of mass production technology for highest efficiency Cu(In,Ga)(Se,S)2-(CIS)formation is introduced.It is based on substrate batch processing by heating,CIS reaction and cooling under forced convection.CIS absorbers are formed by metal precursor deposition on soda lime float glass substrates followed by forced convection reaction in Selenium-and Sulfur containing atmosphere.The process is performed in a very corrosion resistant custom designed multiple chamber mass production equipment.The substrates are 50x120cm2 in size and processed in batches of up to 102 substrates each applying forced convection up to atmospheric pressure.Processing of large batches in the subsequent multiple chambers yields high production capacity even at cycle times above one hour.In this way"best of both worlds"from batch type and inline processing is utilized.The new batch inline-technology is very beneficial in terms of very homogenous temperature distribution and reaction at high heating-and cooling rates.A high average aperture area efficiency of 14,3% at a narrow distribution of +/-0,31% is continuously and reproducibly demonstrated in 24/7-production runs;a peak efficiency of 15.2% is demonstrated.Module Ⅳ-characteristics/distributions and detailed layer analytics results like SEM,electro luminescence and spectral response are shown.This straight forward reliable technology is key for highest performance CIS-module mass production at very competitive costs in the near future.Production costs will be reduced to 0.33-0.37 $/Wp (steady state) in a projected GW fab when module efficiencies of 17% are reached.