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  5. Micromachined WR-3 and WR-1.5 Waveguide Passive Components

Micromachined WR-3 and WR-1.5 Waveguide Passive Components

来源 :The 7th UK/Europe-China Workshop on Millimeter Waves and Ter | 被引量 : 0次 | 上传用户：o70078
【摘 要】
：
　　A precision SU8 micromachining technique has been developed for terahertz waveguide components.These circuits are formed by stacking several layers of silve
【作 者】
：
XiaobangShang[1]Yu-liangDong[2]MichaelJ.Lancaster[1] 
【机 构】
：
School of Electronic,Electrical and Computer Engineering The University of Birmingham,Edgbaston,Birm
【出 处】
：
The 7th UK/Europe-China Workshop on Millimeter Waves and Ter
【发表日期】
：
2014年期
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　　A precision SU8 micromachining technique has been developed for terahertz waveguide components.These circuits are formed by stacking several layers of silver-coated SU8 layers.These SU8 layers are defined by photolithography,and are designed to have the same layer thickness.This paper reviews several of these SU8 micromachined waveguide components operating at 300 GHz and 650 GHz.
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