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1.前言研磨是人类动手操作的最古老的加工方法,也是那个时代的尖端性的技术,并且到现在为止它与其他领域的技术共同被继承下来。作为半导体基板抛光技术和平坦化 CMP 的象征的古老研磨技术,现在成为超精密加工技术,达到巨大的发展水平。在今天,支撑着高度信息化社会的光电机部件,器具等的制造工程中,它是成为不可缺少的加工技术。
1. Introduction Grinding is the oldest processing method of human hands and is also cutting-edge technology of that era, and so far it has been inherited together with other fields of technology. As the symbol of the semiconductor substrate polishing technology and planarization CMP ancient grinding technology, now become ultra-precision machining technology, reached a huge level of development. Today, it is an indispensable processing technology in the manufacturing of optoelectronic components and appliances that support a highly informative society.