热梯度化学气相沉积工艺及其温度梯度的研究

来源 :全国炭素制品信息网第30届炭素技术信息交流会 | 被引量 : 0次 | 上传用户：zmmzoo

【摘要】

：

阐明了用于制备炭/炭复合材料的热梯度化学气相沉积工艺过程和原理.本文测定了预成型体内不同位置的温度,并对温度梯度的变化进行了讨论.研究结果表明,在热梯度化学气相沉积工艺中,预成型体内存在温度梯度,前驱体气体从低温的冷面通过扩散进入高温热解区,前驱体气体在高温热解区裂解沉积热解炭.随着沉积过程的进行,热解区内部的孔隙被热解炭填充,热解区逐层向外推移.热梯度化学气相沉积炉内温度分布可用傅立叶定律来描述

【作者】

：

王万平张桂兰赵建国

【机构】

：

方大炭素新材料科技股份有限公司甘肃兰州 730084 方大炭素新材料科技股份有限公司甘肃兰州

【出处】

：

全国炭素制品信息网第30届炭素技术信息交流会

【发表日期】

：

2014年12期

【关键词】

：

复合材料碳元素热梯度化学气相沉积工艺温度梯度分布规律

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