Investigation of optical and material properties of Si/SiGe/Si heterostructures by using spectroscop

来源 :The 4th Advances in Optoelectronics and Micro/nano-optics (A | 被引量 : 0次 | 上传用户:edwinandwolf
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  The use of silicon germanium (SiGe) as a semiconductor was championed by Bernie Meyerson,an IBM fellow since 1994.SiGe is manufactured onsilicon wafers using conventional silicon processing toolsets.Due to its ease of integration into silicon integrated technology and recently discovered ap-plication in heterojunction bipolar transistors (HBT) and infrared detectors etc.,Si-based SiGe architecture has attracted much attention in these years.
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