【摘 要】
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致密热解碳在工业各个技术部门正在得到广泛的应用。该文介绍采用丙烯(C<,3>H<,6>)和乙炔(C<,2>H<,2>)的混合气体制备致密热解碳层的新工艺,以消除只用丙烯作为反应气体时产生的热效应问题,讨论了沉积温
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致密热解碳在工业各个技术部门正在得到广泛的应用。该文介绍采用丙烯(C<,3>H<,6>)和乙炔(C<,2>H<,2>)的混合气体制备致密热解碳层的新工艺,以消除只用丙烯作为反应气体时产生的热效应问题,讨论了沉积温度、反应气体浓度对致密热解碳层性能的影响。
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