A Micropositioning Stage Based on Piezoceramic Stack Actuators

来源 :The 5th International Congress on Ceramics, ICC5(第五届国际陶瓷大会) | 被引量 : 0次 | 上传用户:ZHAO289868538ZHAO
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  To meet the fast growing needs of precision equipment,micropositioning stage with piezoceramic actuators are becoming more and more prevailing.In this paper,based on piezoceramic stack actuators,a stage(dimension of 50mm×50mm×11mm)with a symmetric displacement magnifying mechanism and several flexure hinges is studied.The piezoceramic stack actuator is fabricated by the tape-casting and the ceramic/internal-electrode co-firing method.
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